Reduction in Al Acceptor Density by Electron Irradiation in Al-Doped 4H-SiC

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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

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751-754

Citation:

H. Matsuura et al., "Reduction in Al Acceptor Density by Electron Irradiation in Al-Doped 4H-SiC", Materials Science Forum, Vols. 457-460, pp. 751-754, 2004

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June 2004

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DOI: https://doi.org/10.4028/www.scientific.net/msf.353-356.517

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