Relationship between Surface Structures and Aluminium Incorporation Behaviour of SiC in Chemical Vapor Deposition

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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

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739-742

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T. Hatayama et al., "Relationship between Surface Structures and Aluminium Incorporation Behaviour of SiC in Chemical Vapor Deposition ", Materials Science Forum, Vols. 457-460, pp. 739-742, 2004

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June 2004

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