Crystallinity and Photoluminescence Evaluation of Er-Implanted n-Type 4H-SiC Subjected to an Annealing Process

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

779-782

DOI:

10.4028/www.scientific.net/MSF.457-460.779

Citation:

S. Uekusa and H. Maruyama, "Crystallinity and Photoluminescence Evaluation of Er-Implanted n-Type 4H-SiC Subjected to an Annealing Process ", Materials Science Forum, Vols. 457-460, pp. 779-782, 2004

Online since:

June 2004

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$35.00

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