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Characteristic of Nanoporous SiO2 Thin Film Prepared by Sol-Gel Method with Catalyst HF

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Abstract:

The characteristic of nanoporous SiO2 thin film prepared by sol-gel method with catalyst HF was studied by scanning electron microscopy, Fourier transform infrared, HP analyzer series and ellipsometry. Results showed the incorporation of HF effectively adjusted the pore size and distribution, and lowered the leakage current density and dielectric constant. This might be related to the weak acidity of HF, which properly controlled the velocity of chemical reaction in solution, and to the introduction of strong Si-F bonds, which had the lower electronegative and the larger volume.

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Periodical:

Materials Science Forum (Volumes 475-479)

Pages:

1733-1736

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.475-479.1733

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Online since:

January 2005

Authors:

Z.W. He, Xing Qin Liu, D.Y. Xu, Qiang Su, D.F. Guo, Y.Y. Wang

Keywords:

HF, Low-K, Nanoporous

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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