Growth of 2 Inches 6H-SiC Single Crystals by Sublimation Method: The Comparison of α- and ß-SiC Powders

Abstract:

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We examined the formation of poly-crystals and polytypes under the point of view applying various powder phases. 6H-SiC single crystal was easily grown by using the green (α-SiC) powder, while the poly-crystals were generated when β-SiC powder was utilized. The method of mixed β-SiC and carbon powder and of graphite pipe inserted in β-SiC powder were applied to overcome the generation of poly-crystals, respectively. It was confirmed that the occurrence of poly-crystals in 6H-SiC crystal was successfully suppressed by C-rich environment.

Info:

Periodical:

Materials Science Forum (Volumes 483-485)

Edited by:

Roberta Nipoti, Antonella Poggi and Andrea Scorzoni

Pages:

17-20

DOI:

10.4028/www.scientific.net/MSF.483-485.17

Citation:

S. H. Seo et al., "Growth of 2 Inches 6H-SiC Single Crystals by Sublimation Method: The Comparison of α- and ß-SiC Powders", Materials Science Forum, Vols. 483-485, pp. 17-20, 2005

Online since:

May 2005

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$35.00

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