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Planar Schottky Microwave Diodes on 4H-SiC
Abstract:
Planar microwave Schottky diodes on 4H-SiC have been designed, processed and measured. Different Schottky metals were tested to study the influence on the microwave performance. A maximum extrinsic cut-off frequency of 30.8GHz was achieved for a Tungsten/SiC-Schottky diode. The diode geometry dependence on both the cut-off frequency and the breakdown voltage was investigated. The breakdown voltage was found to be linearly dependent on the anode-cathode distance.
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937-940
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May 2005
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© 2005 Trans Tech Publications Ltd. All Rights Reserved
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