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Investigation of the Displacement Threshold of Si in 4H SiC
Abstract:
Samples of 4H SiC, both n- and p-doped, have been irradiated with low-energy electrons in a transmission electron microscope. The dependence of the silicon vacancy-related V1 ZPL doublet (~860nm) on electron energy and electron dose has been investigated by low temperature photoluminescence spectroscopy. Furthermore, this luminescence centre has been studied across a broad range of samples of various doping levels. Some annealing characteristics of this centre are reported.
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481-484
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Online since:
October 2006
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© 2006 Trans Tech Publications Ltd. All Rights Reserved
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