Fabrication and Testing of 4H-SiC MESFETs for Analog Functions Circuits

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Abstract:

Lateral normally-on dual gates MESFETs withstanding a drain/source voltage in excess of 200V have been fabricated on semi-insulating 4H-SiC substrate. This paper reports on the fabrication, DC characterization and in-circuit behavior of the MESFETs. Temperature dependent DC characterization has been carried out up to 473K. The performances of basic analog circuits such as an amplifier and a clock, using these MESFETs, are detailed and analyzed.

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Periodical:

Materials Science Forum (Volumes 645-648)

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1159-1162

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Online since:

April 2010

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© 2010 Trans Tech Publications Ltd. All Rights Reserved

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