Iron-Related Defect Centers in 3C-SiC

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Abstract:

p-type 3C-SiC samples were implanted by iron (Fe) and investigated by means of deep level transient spectroscopy (DLTS). Corresponding argon (Ar) profiles with similar implantation damage were implanted in order to distinguish between iron-related defects and defects caused by implantation damage. Two donor-like iron-related centers were identified in p-type 3C-SiC.

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Materials Science Forum (Volumes 679-680)

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265-268

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March 2011

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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