p.249
p.253
p.257
p.261
p.265
p.269
p.273
p.277
p.282
Iron-Related Defect Centers in 3C-SiC
Abstract:
p-type 3C-SiC samples were implanted by iron (Fe) and investigated by means of deep level transient spectroscopy (DLTS). Corresponding argon (Ar) profiles with similar implantation damage were implanted in order to distinguish between iron-related defects and defects caused by implantation damage. Two donor-like iron-related centers were identified in p-type 3C-SiC.
Info:
Periodical:
Pages:
265-268
Citation:
Online since:
March 2011
Keywords:
Price:
Сopyright:
© 2011 Trans Tech Publications Ltd. All Rights Reserved
Share:
Citation: