Efficient Image Segmentation for Detection of Dislocations in High Resolution Light Microscope Images of SiC Wafers

Harald Karpinski; Sakwe Aloysius Sakwe; Michael Fried; Eberhard Bänsch; Peter J. Wellmann

doi:10.4028/www.scientific.net/MSF.679-680.277

Paper Titles

Large-Scale Electronic Structure Calculations of Vacancies in 4H-SiC Using the Heyd-Scuseria-Ernzerhof Screened Hybrid Density Functional
p.261

Formation Mechanism of Stacking Faults in PVT 4H-SiC Created by Deflection of Threading Dislocations with Burgers Vector c+a
p.269

Electrical Activity of Structural Defects in 3C-SiC
p.273

Efficient Image Segmentation for Detection of Dislocations in High Resolution Light Microscope Images of SiC Wafers
p.277

Propagation of Stacking Faults in 3C-SiC
p.282

Etch Pits on 4H-SiC Surface Produced by ClF₃ Gas
p.286

Dislocation Revelation in Highly Doped N-Type 4H-SiC by Molten KOH Etching with Na₂O₂ Additive
p.290

Dislocation Analysis in Highly Doped n-Type 4H-SiC by Using Electron Beam Induced Current and KOH+Na₂O₂ Etching
p.294

HomeMaterials Science ForumMaterials Science Forum Vols. 679-680Efficient Image Segmentation for Detection of...

Efficient Image Segmentation for Detection of Dislocations in High Resolution Light Microscope Images of SiC Wafers

Abstract:

The determination of dislocation density and in particular the dislocation distribution in SiC wafers is of particular interest for SiC crystal growth development and production. We present an image recognition tool allowing the wafer analysis with specific needs for SiC. In the first stage of expansion, micropipes are selected and counted from SiC wafers that have been etched by KOH.

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Silicon Carbide and Related Materials 2010

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Periodical:

Materials Science Forum (Volumes 679-680)

Pages:

277-281

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.679-680.277

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Online since:

March 2011

Authors:

Harald Karpinski, Sakwe Aloysius Sakwe, Michael Fried, Eberhard Bänsch, Peter J. Wellmann

Keywords:

Automatic Detection, Dislocation, Image Analysis, Silicon Carbide (SiC)

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References

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