High Temperature Defect-Free Rapid Thermal Annealing of III-V Substrates in Metallorganic Controlled Ambient

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Periodical:

Materials Science Forum (Volumes 83-87)

Edited by:

Gordon Davies, G.G. DeLeo and M. Stavola

Pages:

1509-1518

DOI:

10.4028/www.scientific.net/MSF.83-87.1509

Citation:

A. Katz et al., "High Temperature Defect-Free Rapid Thermal Annealing of III-V Substrates in Metallorganic Controlled Ambient", Materials Science Forum, Vols. 83-87, pp. 1509-1518, 1992

Online since:

January 1992

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$35.00

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