High Temperature Defect-Free Rapid Thermal Annealing of III-V Substrates in Metallorganic Controlled Ambient

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 83-87)

Edited by:

Gordon Davies, G.G. DeLeo and M. Stavola

Pages:

1509-1518

Citation:

A. Katz et al., "High Temperature Defect-Free Rapid Thermal Annealing of III-V Substrates in Metallorganic Controlled Ambient", Materials Science Forum, Vols. 83-87, pp. 1509-1518, 1992

Online since:

January 1992

Export:

Price:

$38.00

Fetching data from Crossref.
This may take some time to load.