Observation of a Trivalent Ge Defect in Oxygen Implanted SiGe Alloys

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Periodical:

Materials Science Forum (Volumes 83-87)

Edited by:

Gordon Davies, G.G. DeLeo and M. Stavola

Pages:

1493-1498

Citation:

M. E. Zvanut et al., "Observation of a Trivalent Ge Defect in Oxygen Implanted SiGe Alloys", Materials Science Forum, Vols. 83-87, pp. 1493-1498, 1992

Online since:

January 1992

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$38.00

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