Paper Titles
A Competitive Lattice Model Monte Carlo Method for Simulation of Competitive Growth of Different Polytypes in SiC Single Crystal
p.45
Application of In Situ 3D Computed Tomography during PVT Growth of 4H-SiC for the Study of Source Material Consumption under Varying Growth Conditions
p.49
Characterization of Lattice Plane Bending and Stress Distribution in Physical Vapor Transport-Grown 4H-SiC Crystals
p.53
Spatial Distribution of Carrier Concentration in 4H-SiС Crystal Grown by Solution Method
p.57
Doping Fluctuation and Defect Formation in Fast 4H-SiC Crystal Growth Using a High-Temperature Gas Source Method
p.61
Effect of Solution Drift on Crystalline Morphology in the Solution Growth of Off-Axis 4H-SiC Crystals
p.65
Effects of Hydrogen Concentration on the Growth of High Purity 4H-SiC Single Crystal Grown by Sublimation Method
p.69
Evolution of Threading Edge Dislocations at Earlier Stages of PVT Growth for 4H-SiC Single Crystals
p.73
Growth of Low Resistivity p-Type 4H-SiC Crystals by Sublimation with Using Aluminum and Nitrogen Co-Doping
p.77

Doping Fluctuation and Defect Formation in Fast 4H-SiC Crystal Growth Using a High-Temperature Gas Source Method

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Abstract:

This paper investigates the quality of 4H-SiC crystals grown at a very fast growth rate (> 2.5 mm/h) using a high-temperature gas source method. Differences in nitrogen doping efficiency were clarified in facet and step-flow regions. In case for growth in the macro-step bunching mode, doping fluctuation and void formation were observed in the macro-step bunching region. Propagation of threading screw dislocations (TSDs) in the grown crystal was also investigated by synchrotron X-ray topography.

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Periodical:

Materials Science Forum (Volume 858)

Pages:

61-64

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.858.61

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Online since:

May 2016

Authors:

Isaho Kamata*, Norihiro Hoshino, Yuichiro Tokuda, Emi Makino, Naohiro Sugiyama, Jun Kojima, Hidekazu Tsuchida

Keywords:

High-Temperature Gas Source Method, Synchrotron X-Ray Topography, Threading Screw Dislocations (TSDs)

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© 2016 Trans Tech Publications Ltd. All Rights Reserved

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References

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