3C-SiC Microdisks for Visible Photonics

Marina Radulaski; Thomas Babinec; Jing Yuan Linda Zhang; Sonia Buckley; Yousif Kelaita; Kai Müller; Konstantinos Lagoudakis; Kassem Alassaad; Gabriel Ferro; Jelena Vučković

doi:10.4028/www.scientific.net/MSF.858.711

Paper Titles

Interface Analysis of P-Type 4H-SiC/Al₂O₃ Using Synchrotron-Based XPS
p.693

Passivation and Generation of States at P-Implanted Thermally Grown and Deposited N-Type 4H-SiC/SiO₂ Interfaces
p.697

Impact of Phosphorus Implantation on the Electrical Properties of SiO₂/4H-SiC Interfaces Annealed in N₂O
p.701

Conduction Mechanisms at SiO₂/4H-SiC Interfaces in MOS-Based Devices Subjected to Post Deposition Annealing in N₂O
p.705

3C-SiC Microdisks for Visible Photonics
p.711

Etching Rate Behavior of 4H-Silicon Carbide Epitaxial Film Using Chlorine Trifluoride Gas
p.715

Development of “Si-Vapor Etching” and “Si Vapor Ambient Anneal” in TaC/Ta Composite Materials
p.719

Novel 3C-SiC Microstructure for MEMS Applications
p.723

Study of 4H-SiC Junction Barrier Schottky(JBS) Diode Using Various Junction Structures
p.733

HomeMaterials Science ForumMaterials Science Forum Vol. 8583C-SiC Microdisks for Visible Photonics

3C-SiC Microdisks for Visible Photonics

Abstract:

We fabricated and characterized record small microdisk resonators in thin (210 nm) 3C-SiC film grown on Si (100) substrate. It was found to support high quality factor whispering gallery modes at visible wavelengths. We demonstrated room temperature coupling of these modes to the intrinsic photoluminescence of 3C-SiC at room temperatures and identified their polarization. Finally, we discussed applications for quasi-phasematched second harmonic generation from infrared visible wavelengths.

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Silicon Carbide and Related Materials 2015

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Periodical:

Materials Science Forum (Volume 858)

Pages:

711-714

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.858.711

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Online since:

May 2016

Authors:

Marina Radulaski, Thomas Babinec, Jing Yuan Linda Zhang, Sonia Buckley, Yousif Kelaita, Kai Müller, Konstantinos Lagoudakis, Kassem Alassaad, Gabriel Ferro*, Jelena Vučković

Keywords:

3C-SiC, Microcavities, Photonics, Quantum Electrodynamics

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