The Effect of Incomplete Ionization on SiC Devices during High Speed Switching

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Abstract:

SiC devices such as MOSFETs and SBDs reduce power loss in fast-switching condition as compared to Si devices. However, shallow and deep levels in SiC significantly affect dynamic characteristics of SiC devices. We already reported that high densities of deep levels were discovered in Al+-implanted samples other than the shallow Al acceptor level. In this work, we applied the deep level to the TCAD simulation, and examined the behavior of the carriers at high dV/dt conditions.

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467-470

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May 2017

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© 2017 Trans Tech Publications Ltd. All Rights Reserved

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[1] K. Hamada, N. Miura, S. Hino, T. Kawakami, M. Imaizumi, H. Sumitani, Jpn. J. Appl. Phys. 52 (2013) 04CP03.

Google Scholar

[2] K. Ebihara, Y. Yamamoto, Y. Nakaki, S. Aya, S. Nakata, M. Imaizumi, Y. Toyoda, S. Yamakawa, Mater. Sci. Forum 778-780 (2014) 791.

DOI: 10.4028/www.scientific.net/msf.778-780.791

Google Scholar

[3] I.G. Ivanov, B. Magnusson, and E. Janzén, Phys. Rev. B 67 (2003) 165211.

Google Scholar

[4] H. Matsuura, M. Komeda, S. Kagamihara, H. Iwata, R. Ishihara, J. App. Phys. 96 (2004) 2708.

Google Scholar

[5] J. Pernot, S. Contreras, J. Camassel, J. App. Phys. 98 (2005) 023706.

Google Scholar

[6] A. Koizumi, J. Suda, T. Kimoto, J. App. Phys. 106 (2009) 013716.

Google Scholar

[7] M. Lades, Modeling and Simulation of Wide Bandgap Semiconductor Devices: 4H/6H-SiC, Lehrstuhl für Technische Elektrophysik, (2000).

Google Scholar

[8] S. Beljakowa, S. A. Reshanov, B. Zippelius, M. Krieger, G. Pensl, K. Danno, T. Kimoto, S. Onoda, T. Ohshima, F. Yan, R. P. Devaty, W. J. Choyke, Mater. Sci. Forum 645-648 (2010) 427.

DOI: 10.4028/www.scientific.net/msf.645-648.427

Google Scholar

[9] K. Yoshihara, M. Kato, M. Ichimura, T. Hatayama, T. Ohshima, Mater. Sci. Forum 740-742 (2013) 373.

Google Scholar

[10] K. Kawahara, H. Watanabe, N. Miura, S. Nakata, S. Yamakawa, Mater. Sci. Forum 821-823 (2015) 403.

Google Scholar