Activation Process and Mechanism of ZrCoCe Getter Films

Abstract:

In order to study the activation process and mechanism of ZrCoCe, highly porous ZrCoCe getter films were grown by the DC magnetron sputtering method. The effect of activation temperature on the surface composition of the porous ZrCoCe getter films were studied by X-ray photoelectron spectroscopy (XPS). The results shows that the surface of air-exposed porous ZrCoCe film is covered with H₂O, CO₂ and hydrocarbons, both Zr and Ce exist in the oxidized state, and zirconium oxide starts to reduce at 300 °C. The activation process also results in a sizable Co segregation at surface. In addition, zirconium carbide can be found in the subsurface region of the film after thermal activation treatment.

• Periodical: Materials Science Forum (Volume 944)
• Pages: 613-618
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.944.613
• Online since: January 2019
• Authors: Yaohua Xu*, Yao Zong Sui, Xiao Zhang, Hao Liu, Peng Yuan, Feng Wei
• Keywords: Activation, Magnetron Sputtering, Non-Evaporable Getter, XPS, ZrCoCe

References

[1] Y.F. Jin, Z.F. Wang, L. Zhao, P.C. Lim, J. Wei and C.K. Wong, Zr/V/Fe thick film for vacuum packaging of MEMS, J. Micromech. Microeng. 14 (2004) 687-692.

DOI: 10.1088/0960-1317/14/5/005

[2] F. Sutara, I. Matolinova, T. Skala, Residual surface oxide on ZrV getter-XPS, LEIS and SIMS study, Vacuum. 74 (2004) 305-309.

DOI: 10.1016/j.vacuum.2003.12.144

[3] V. Matolin, J. Drbohlav, K. Masek, Mechanism of non-evaporable getter activation XPS and static SIMS study of Zr44V56 alloy, Vacuum. 71 (2003) 317-322.

DOI: 10.1016/s0042-207x(02)00756-x

[4] V. Matolin, K. Masek, I. Matolinova, XPS and SIMS study of the ageing mechanism of Zr-V non-evaporable getter films, Appl. Surf. Sci. 235 (2004) 202-206.

DOI: 10.1016/j.apsusc.2004.05.125

[5] C. Benvenuti, P. Chiggiato, P.C. Pinto, Influence of the substrate coating temperature on the vacuum properties of Ti-Zr-V non-evaporable getter films, Vacuum. 71(1-2) (2003) 307-315.

DOI: 10.1016/s0042-207x(02)00755-8

[6] P. Chiggiato, P.C. Pinto, Ti-Zr-V non-evaporable getter films: From development to large scale production for the Large Hadron Collider, Thin Solid Films. 515 (2006) 382-388.

DOI: 10.1016/j.tsf.2005.12.218

[7] C.C. Li, J.L. Huang, R.J. Lin, Characterization of activated non-evaporable porous Ti and Ti-Zr-V getter films by synchrotron radiation photoemission spectroscopy, Thin Solid Films. 515 (2006) 1121-1125.

DOI: 10.1016/j.tsf.2006.07.052

[8] C.C. Li, J.L. Huang, R.J. Lin, Preparation and characterization of non-evaporable porous Ti-Zr-V getter films, Surf. Coat. Technol. 201 (2006) 3977-3981.

DOI: 10.1016/j.surfcoat.2006.08.018

[9] C.C. Li, J.L. Huang, R.J. Lin, Activation characterization of non-evaporable Ti-Zr-V getter films by synchrotron radiation photoemission spectroscopy, Thin Solid Films. 517 (2009) 5876-5880.

DOI: 10.1016/j.tsf.2007.06.102

[10] Y.H. Xu, J.D. Cui, H. Cui, ZrCoCe Getter Films for MEMS Vacuum Packaging, J. Electron. Mater. 45 (2016) 386-390.

DOI: 10.1007/s11664-015-4098-5

[11] T.B. Zhang, M. Zhang, R. Hu, Hydrogen absorption behavior of a Pd-coated Zr70Fe5.4V24.6 getter material against gaseous impurities, Vacuum. 122 (2015) 222-229.

DOI: 10.1016/j.vacuum.2015.10.007

[12] J.G. Bu, C.H. Mao, Y. Zhang, Preparation and sorption characteristics of Zr-Co-RE getter films, J Alloy Compd. 529 (2012) 69-72.

DOI: 10.1016/j.jallcom.2012.01.030

[13] D. Petti, M. Cantoni, M. Leonea, Activation of Zr-Co-rare earth getter films: An XPS study, Appl. Surf. Sci. 256 (2010) 6291-6296.

DOI: 10.1016/j.apsusc.2010.04.006