Preparation and Characterization of Ni/ZrCoCe Stack Getter Films

Abstract:

In order to improve the oxidation resistance of the ZrCoCe getter, highly porous Ni/ZrCoCe stack getter films were grown by the magnetron sputtering method. Scanning electron microscope (SEM) analysis indicate that the Ni/ZrCoCe stack film is composed of isolated columns. The film surface with cauliflower-like topography is formed among finely packed nanocrystals. Gas sorption investigation shows that the Ni/ZrCoCe stack film can be activated at 300 °C for 30 min and exhibits more favorable sorption capability than ZrCoCe bi-layered film. XPS results show that the Ni protective layer can play an important role in protecting the ZrCoCe film against oxidation. It can also improve the surface dissociation and diffusion of H₂.

• Periodical: Materials Science Forum (Volume 944)
• Pages: 619-624
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.944.619
• Online since: January 2019
• Authors: Peng Yuan, Yao Zong Sui, Xiao Zhang, Hao Liu, Feng Wei, Yaohua Xu*
• Keywords: Magnetron Sputtering, Ni/ZrCoCe, Non-Evaporable Getter, Sorption Property, Stack Films, XPS

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