Polytype Control by Pretreatment of SiC Source Powder for 4H-SiC Single Crystal Growth

Jung Woo Choi; Jung Gyu Kim; Byung Kyu Jang; Sang Ki Ko; Myung Ok Kyun; Jung Doo Seo; Kap Ryeol Ku; Chae Young Lee; Won Jae Lee

doi:10.4028/www.scientific.net/MSF.963.38

Paper Titles

Impacts of TaC Coating on SiC PVT Process Control and Crystal Quality
p.22

Major Carrier Element Concentrations in SiC Powder and Bulk Crystal
p.26

Variation of Vanadium Incorporation in Semi-Insulating SiC Single Crystals Grown by PVT Method
p.30

Study on N and B Doping by Closed Sublimation Growth Using Separated Ta Crucible
p.34

Polytype Control by Pretreatment of SiC Source Powder for 4H-SiC Single Crystal Growth
p.38

Optimization of the SiC Powder Source Size Distribution for the Sublimation Growth of Long Crystals Boules
p.42

New Materials for Semi-Insulating SiC Single Crystal Growth by PVT Method
p.46

A Comparative Study of the Crystal Growth Techniques of Silicon Carbide, Technology Adaption and the Road to Low Cost Silicon Carbide Materials
p.51

Research on the Key Problems in the Industrialization of SiC Substrate Materials
p.56

HomeMaterials Science ForumMaterials Science Forum Vol. 963Polytype Control by Pretreatment of SiC Source...

Polytype Control by Pretreatment of SiC Source Powder for 4H-SiC Single Crystal Growth

Abstract:

4H-SiC single crystal was successfully grown with source powder modified by the pretreatment process in order to improve polytype stability of SiC crystal. To increase C/Si ratio in SiC source powder, SiC source powder was mixed with liquid carbon source and then pre-heated at 1200°C. SiC single crystal grown with modified source powder exhibited complete 4H polytype and the crystal quality of SiC crystal grown by modified source power was definitely better than conventional source powder

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Periodical:

Materials Science Forum (Volume 963)

Pages:

38-41

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.963.38

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Online since:

July 2019

Authors:

Jung Woo Choi, Jung Gyu Kim, Byung Kyu Jang, Sang Ki Ko, Myung Ok Kyun, Jung Doo Seo, Kap Ryeol Ku, Chae Young Lee, Won Jae Lee*

Keywords:

Crystal Quality, Excess Carbon, Polytype Control, Powder Pretreatment

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