The Phase Composition and Structure of Silicon-Carbon Coatings

Abstract:

The effect of the formation and heat treatment modes of silicon-carbon coatings deposited by ion-beam sputtering of silicon carbide on their morphology, chemical and phase composition is determined. It has been established that an increase in the power of the ion source from 432 W to 738 W leads to a decrease in the sp³/sp² phase ratio by 1.7 times and an increase in the ratio of Si-C/Si-O bonds by 1.9 times. It is shown that doping of carbon coatings with silicon carbide increases their heat resistance.

• Periodical: Materials Science Forum (Volume 970)
• Pages: 283-289
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.970.283
• Online since: September 2019
• Authors: Alexander S. Rudenkov, Alexander V. Rogachev, Alexander N. Kupo, Petr A. Luchnikov, Nataliya Chicherina*
• Keywords: Carbon, Ion Beam Sputtering, Phase Composition, Raman Spectroscopy, Roughness, Silicon, XPS

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