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HomeSolid State PhenomenaSolid State Phenomena Vols. 103-104The Degradation Prevention of Resin Materials for...

The Degradation Prevention of Resin Materials for Semiconductor Manufacturing Equipment by Applying the Ultra-High Purity Gas Supply Technology

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Ultra Clean Processing of Silicon Surfaces VII

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Periodical:

Solid State Phenomena (Volumes 103-104)

Pages:

255-258

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.103-104.255

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Online since:

April 2005

Authors:

Atsushi Hidaka, Satoru Yamashita, Naoki Tanahashi, Hidekazu Ishii, Masafumi Kitano, Yasuyuki Shirai, Tadahiro Ohmi

Keywords:

Degradation Prevention, Molding Environment, Organic Contaminants, Resin Materials

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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[8] Y.Shirai, M. Narazaki and T. Ohmi: IEICE Trans. Electron., Vol. E79-C, No. 3 (1996), pp.385-391.

[9] M. Yoshida, A. Seki, Y. Shirai and T. Ohmi: Journal of Vacuum Science & Technology A, Vol. 17, No. 3 (1999), pp.1059-1065.