Prevention of Copper Cross-Contamination on Cu Process and Non-Cu Process Mixed Fabrication

Abstract:

Article Preview

When the integration of Cu process and non-Cu process is mixed in the fabrication, the prevention of Cu cross-contamination between wafer-to-wafer and machine-to-machine is critical. This study suggests a prevention method of the cross-contamination in Cu fabrication line.

Info:

Periodical:

Solid State Phenomena (Volumes 103-104)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

237-240

DOI:

10.4028/www.scientific.net/SSP.103-104.237

Citation:

J. B. Shim et al., "Prevention of Copper Cross-Contamination on Cu Process and Non-Cu Process Mixed Fabrication", Solid State Phenomena, Vols. 103-104, pp. 237-240, 2005

Online since:

April 2005

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Price:

$35.00

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