Prevention of Copper Cross-Contamination on Cu Process and Non-Cu Process Mixed Fabrication
When the integration of Cu process and non-Cu process is mixed in the fabrication, the prevention of Cu cross-contamination between wafer-to-wafer and machine-to-machine is critical. This study suggests a prevention method of the cross-contamination in Cu fabrication line.
Paul Mertens, Marc Meuris and Marc Heyns
J. B. Shim et al., "Prevention of Copper Cross-Contamination on Cu Process and Non-Cu Process Mixed Fabrication", Solid State Phenomena, Vols. 103-104, pp. 237-240, 2005