Plasma Cleaning for W Polymetal Gate

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Periodical:

Solid State Phenomena (Volumes 103-104)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

59-62

Citation:

A. Kabansky and H. Lee, "Plasma Cleaning for W Polymetal Gate", Solid State Phenomena, Vols. 103-104, pp. 59-62, 2005

Online since:

April 2005

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Price:

$38.00

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