Plasma Cleaning for W Polymetal Gate

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 103-104)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

59-62

DOI:

10.4028/www.scientific.net/SSP.103-104.59

Citation:

A. Kabansky and H. Lee, "Plasma Cleaning for W Polymetal Gate", Solid State Phenomena, Vols. 103-104, pp. 59-62, 2005

Online since:

April 2005

Export:

Price:

$35.00

In order to see related information, you need to Login.