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HomeSolid State PhenomenaSolid State Phenomena Vols. 103-104Development of New Batch-Type Plasma Assisted NOR...

Development of New Batch-Type Plasma Assisted NOR (Native-Oxide-Removal) Dry Cleaning Equipment

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Ultra Clean Processing of Silicon Surfaces VII

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Periodical:

Solid State Phenomena (Volumes 103-104)

Pages:

63-66

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.103-104.63

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Online since:

April 2005

Authors:

Wan Sik Kim, Wan Goo Hwang, Il-Kyoung Kim, Ki-Young Yun, Kwang Myung Lee, Seung Ki Chae

Keywords:

Batch-Type Process, Dry Cleaning, Native Oxide Removal NOR

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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