Development of New Batch-Type Plasma Assisted NOR (Native-Oxide-Removal) Dry Cleaning Equipment

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Periodical:

Solid State Phenomena (Volumes 103-104)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

63-66

DOI:

10.4028/www.scientific.net/SSP.103-104.63

Citation:

W. S. Kim et al., "Development of New Batch-Type Plasma Assisted NOR (Native-Oxide-Removal) Dry Cleaning Equipment", Solid State Phenomena, Vols. 103-104, pp. 63-66, 2005

Online since:

April 2005

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$35.00

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