Effective Rinse Aiming at Water-Mark-Free Drying for Single-Spin Wet Cleaning Process

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Periodical:

Solid State Phenomena (Volumes 103-104)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

79-82

Citation:

K. Miya et al., "Effective Rinse Aiming at Water-Mark-Free Drying for Single-Spin Wet Cleaning Process", Solid State Phenomena, Vols. 103-104, pp. 79-82, 2005

Online since:

April 2005

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Price:

$38.00

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