ZnO Nanowalls and Nanocolumns Grown by Metalorganic Chemical Vapor Deposition

Sang Woo Kim; Shizuo Fujita; Min Su Yi; Han Ki Kim; Bee Lyong Yang; Dae Ho Yoon

doi:10.4028/www.scientific.net/SSP.124-126.77

Paper Titles

Initial Growth Mode of GaN Film on Stepped Sapphire
p.61

Etching Mechanism of ZnO Thin Films in Inductively Coupled Plasma
p.65

Growth of Ga-Doped ZnO Bilayer by RF Magnetron Sputtering with Different Atmospheres
p.69

Fabrication of Flexible CIGS Solar Cell on Stainless Steel Substrate by co-Evaporation Process
p.73

ZnO Nanowalls and Nanocolumns Grown by Metalorganic Chemical Vapor Deposition
p.77

Electroless Plated Pd/GaAs Schottky Diode and its Application to Hydrogen Detection
p.81

Characteristics of Thermal Performance in High Power LED Package with Heat Pipe
p.85

Deep Level Defects in Al_xGa_1-xN/GaN Heterointerfaces Grown by Molecular Beam Epitaxy
p.89

Atomic Arrangement and Formation Mechanism of c-Axis Oriented ZnO Thin Films Grown on p-Si Substrates
p.93

HomeSolid State PhenomenaSolid State Phenomena Vols. 124-126ZnO Nanowalls and Nanocolumns Grown by...

ZnO Nanowalls and Nanocolumns Grown by Metalorganic Chemical Vapor Deposition

Abstract:

ZnO nanowalls and nanocolumns were synthesized on Si3N4 (50 nm)/Si (001) substrates at low growth temperature (350 and 400 oC) by metalorganic chemical vapor deposition (MOCVD) with no metal catalysts. ZnO nanowalls with extremely small wall thicknesses below 10 nm and nanocolumns with diameters over 100 nm were formed on the Si3N4/Si substrates relying on MOCVD-growth temperature. It was found that ZnO nanowalls have a strong c-axis preferred orientation with a hexagonal structure, while ZnO nanocolumns have a weak c-axis preferred orientation with broken stacking orders in synchrotron x-ray scattering experiments. In addition, strong free-exciton emission from the ZnO nanowalls was clearly observed in photoluminescence measurements. On the other hand, we could not observe any emission bands from the ZnO nanocolumn samples.