X-Ray Spectrometry for Wafer Contamination Analysis and Speciation as Well as for Reference-Free Nanolayer Characterization

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

277-280

DOI:

10.4028/www.scientific.net/SSP.134.277

Citation:

B. Beckhoff et al., "X-Ray Spectrometry for Wafer Contamination Analysis and Speciation as Well as for Reference-Free Nanolayer Characterization ", Solid State Phenomena, Vol. 134, pp. 277-280, 2008

Online since:

November 2007

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Price:

$35.00

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