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HomeSolid State PhenomenaSolid State Phenomena Vol. 134Surface Microroughness of Silicon in Wet Process...

Surface Microroughness of Silicon in Wet Process and its Minimization

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Periodical:

Solid State Phenomena (Volume 134)

Pages:

45-48

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.134.45

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Online since:

November 2007

Authors:

Hitoshi Morinaga, Kenji Shimaoka, Tadahiro Ohmi

Keywords:

Microroughness, Photoinduced Oxidation, Photoinduced Roughness

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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