Single-Wafer Wet Chemical Oxide Formation for Pre-ALD High-k Deposition on 300 mm Wafer

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

53-56

DOI:

10.4028/www.scientific.net/SSP.134.53

Citation:

K. Sano et al., "Single-Wafer Wet Chemical Oxide Formation for Pre-ALD High-k Deposition on 300 mm Wafer", Solid State Phenomena, Vol. 134, pp. 53-56, 2008

Online since:

November 2007

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$35.00

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