Critical Thickness Threshold in HfO2 Layers

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

67-70

DOI:

10.4028/www.scientific.net/SSP.134.67

Citation:

P. Besson et al., "Critical Thickness Threshold in HfO2 Layers ", Solid State Phenomena, Vol. 134, pp. 67-70, 2008

Online since:

November 2007

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$35.00

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