Development of a New TaN Etchant for Metal Gate

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

75-78

DOI:

10.4028/www.scientific.net/SSP.134.75

Citation:

M. S. Lee et al., "Development of a New TaN Etchant for Metal Gate", Solid State Phenomena, Vol. 134, pp. 75-78, 2008

Online since:

November 2007

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$35.00

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