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HomeSolid State PhenomenaSolid State Phenomena Vol. 134Peracetic Acid as Active Species in Mixtures for...

Peracetic Acid as Active Species in Mixtures for Selective Etching of SiGe/Si Layer Systems – Aspects of Chemistry and Analytics

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Periodical:

Solid State Phenomena (Volume 134)

Pages:

79-82

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.134.79

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Online since:

November 2007

Authors:

Mathias Guder, Bernd O. Kolbesen, Cécile Delattre, C. Fischer, H. Schier, Gerald Wagner

Keywords:

Equilibrium, Iodometric Titration, Kinetic, Peracetic Acid, Photometry, Selective Etching, Silicon-Germanium (SiGe), sSOI

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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