Galvanic Corrosion of Stacked Metal Gate Electrodes during Cleaning in HF Solutions

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

87-90

DOI:

10.4028/www.scientific.net/SSP.134.87

Citation:

S. Garaud et al., "Galvanic Corrosion of Stacked Metal Gate Electrodes during Cleaning in HF Solutions ", Solid State Phenomena, Vol. 134, pp. 87-90, 2008

Online since:

November 2007

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$35.00

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