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HomeSolid State PhenomenaSolid State Phenomena Vol. 134Galvanic Corrosion of Stacked Metal Gate...

Galvanic Corrosion of Stacked Metal Gate Electrodes during Cleaning in HF Solutions

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Ultra Clean Processing of Semiconductor Surfaces VIII

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Periodical:

Solid State Phenomena (Volume 134)

Pages:

87-90

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.134.87

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Online since:

November 2007

Authors:

Sylvain Garaud, Rita Vos, Denis Shamiryan, Vasile Paraschiv, Paul W. Mertens, Jan Fransaer, Stefan De Gendt

Keywords:

Galvanic Corrosion, Hardmask Removal, Hydrofluoric Acid (HF), Metal Gate, Wet Cleaning

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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