Paper Title:
Surface Preparation Challenge on Nitrided Gate Oxides
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
71-74
DOI
10.4028/www.scientific.net/SSP.134.71
Citation
P. Garnier, D. Barge, J. Bienacel, B. Tavel, N. Cabuil, D. Lévy, K. Barla, "Surface Preparation Challenge on Nitrided Gate Oxides", Solid State Phenomena, Vol. 134, pp. 71-74, 2008
Online since
November 2007
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