A Novel Vapor Phase Etching Process for Si

Abstract:

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Periodical:

Solid State Phenomena (Volumes 145-146)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

239-242

DOI:

10.4028/www.scientific.net/SSP.145-146.239

Citation:

S. Verhaverbeke "A Novel Vapor Phase Etching Process for Si", Solid State Phenomena, Vols. 145-146, pp. 239-242, 2009

Online since:

January 2009

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Price:

$35.00

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