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HomeSolid State PhenomenaSolid State Phenomena Vols. 145-146A Novel Vapor Phase Etching Process for Si

A Novel Vapor Phase Etching Process for Si

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Ultra Clean Processing of Semiconductor Surfaces IX

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Periodical:

Solid State Phenomena (Volumes 145-146)

Pages:

239-242

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.145-146.239

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Online since:

January 2009

Authors:

Steven Verhaverbeke

Keywords:

HF, Ozone, Si Etching, Solvent, Vapor Phase Etching

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© 2009 Trans Tech Publications Ltd. All Rights Reserved

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