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HomeSolid State PhenomenaSolid State Phenomena Vols. 145-146Influence of Dry Ashing and Wet Treatments on NVM...

Influence of Dry Ashing and Wet Treatments on NVM Metal Gate Structures

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Periodical:

Solid State Phenomena (Volumes 145-146)

Pages:

257-260

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.145-146.257

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Online since:

January 2009

Authors:

Alice C. Elbaz, Enrico Bellandi, Cinzia De Marco, Luigi M. Avaro, Enrica Ravizza, Roberta Piva, Mauro Alessandri

Keywords:

Metal Gate, Resist Removal

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© 2009 Trans Tech Publications Ltd. All Rights Reserved

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