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Solid State Phenomena
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HomeSolid State PhenomenaSolid State Phenomena Vols. 19-20

Solid State Phenomena Vols. 19-20

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.19-20

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Table of Contents

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Paper Title Page

TEM Investigations on the Structure and Stability of Diffusion Barriers for VLSI Contacts
Authors: S. Hopfe, Manfred Reiche
611
Defect Characterization of Thick SOI-Layers and Eptaxial Grown Layers on SOI Substrates
Authors: K. Höppner, Bernd Tillack, R. Banisch, H.H. Richter, O. Joachim
617
SOI by Silicon Wafer Direct Bonding - Problems of Wafer Warpage and Surface Chemistry
Authors: G. Kissinger, W. Kissinger, H. Hofmann, Joachim Krüger
625
Temperature Profiles Induced by Recrystallization of Silicon-on-Insulator with Scanning Incoherent Light Line Source
Authors: H.H. Richter, H. Andrä, Bernd Tillack, O. Joachim, W. Weinelt, R. Banisch, K. Hoeppner
631
Zinc and Zinc-Impurity Pairs in Silicon
Authors: C.A.J. Ammerlaan, H.E. Altink
639

Showing 81 to 85 of 85 Paper Titles

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