Characterisation of Dislocation-Content in Multicrystalline-Silicon Wafers

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Abstract:

A major performance limiting factor of multicrystalline silicon wafers is structural defects, mainly dislocations, reducing solar cell efficiency. Dislocations are formed during crystallisation process. Characterization of dislocation-content is necessary both to optimise the crystallisation and to eliminate bad wafers before cell processing. We developed two techniques to characterise dislocations: conventional etch-pit counting modified for full size wafers using a new etch-recipe and a novel etch-pit counting algorithm. Secondly we developed a technique to estimate the dislocation content directly from photoluminescence images of as-cut wafers.

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Periodical:

Solid State Phenomena (Volumes 205-206)

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65-70

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Online since:

October 2013

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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