ZnO Nanoparticle Formation in ⁶⁴Zn⁺ Ion Implanted Al₂O₃

Abstract:

ZnO nanoparticles (NPs) formed in (-1012) sapphire substrates have been studied. The NPs were formed by implantation of ⁶⁴Zn⁺ ions followed by furnace annealing in oxygen atmosphere for 1h at elevated temperatures. The radiation defects and Zn implant profiles were investigated by Rutherford backscattering spectroscopy of He⁺ ions with energy of 1.7MeV with scattering angle of 160^o at Van de Graff accelerator using the ion channeling technique (RBS/CT). The surface morphology was studied by atomic force microscopy (AFM) and scan electron microscopy in secondary emission mode (SEM-SE). The distribution of Zn implant profiles was analyzed by secondary ion mass-spectrometry (SIMS). Identification of the phase content of the materials was carried out by X-ray photoelectron spectroscopy (XPS). In as implanted samples, a near-surface amorphization layer was formed, and in this layer the surface voids were created. After annealing in temperature range of 600-900°C the ZnO phase was synthesized in sapphire substrate. After annealing at 900°C one can see the phase variation from ZnO/Zn phases at sample surface to metal Zn phase in sample body at a depth of 40nm. Annealing at temperatures above 900°C leads to disappearing of ZnO phase and creating of ZnAl₂O₄ phase.

• Periodical: Solid State Phenomena (Volume 242)
• Pages: 396-401
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.242.396
• Online since: October 2015
• Authors: Vladimir V. Privezentsev*, V.S. Kulikauskas, A.N. Palagushkin, Edward A. Steinman, A.N. Tereshchenko, A.A. Batrakov, S.N. Ksenich
• Keywords: Al₂O₃, Annealing, Ion Implantation, Nanoparticles, ZNO

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