Electrostatic Discharge Control and Visualization in Spray Nozzle

Ji Hoon Cha; Tae Hong Kim; Young Hoo Kim; Kuntack Lee; Yong Sun Koh

doi:10.4028/www.scientific.net/SSP.282.77

Paper Titles

Ion Implanted Photoresist Removal by Material Loss-Free Organic Solvent
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Removal of CrN Contamination from EUV Mask Backside Using Dry Cleaning
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Damage-Free Cleaning of Advanced Structure Using Timely Energized Bubble Oscillation Megasonic Technology
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An Observation Method of Real Contact Area during PVA Brush Scrubbing
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Electrostatic Discharge Control and Visualization in Spray Nozzle
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Behavior Analysis of Si Etching Process with HF/HNO₃ Mixture in Single-Spin Wafer Process
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Study of the Anisotropic Wet Etching of Nanoscale Structures in Alkaline Solutions
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Unexpected Pyramid Texturization of n-Type Ge (100) via Electrochemical Etching: Bridging Surface Chemistry and Morphology
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Selective Wet Etching in Fabricating SiGe and Ge Nanowires for Gate-all-Around MOSFETs
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Electrostatic Discharge Control and Visualization in Spray Nozzle

Abstract:

The general method to remove contaminated particles in the non-pattern cleaning such as pre-photo cleaning, post-deposition cleaning, and post-CMP cleaning is to physically remove particles using spray nozzle. However, high-speed fluids for increasing particle removal efficiency cause static electricity due to friction between liquid and nozzle surfaces, resulting in unexpected charge defects. In this study, we propose a method to reduce static electricity by changing the material of nozzle and grounding by visualizing static electricity according to electric voltage.