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HomeSolid State PhenomenaSolid State Phenomena Vols. 32-33Process-Induced Defects in Silicon Technology

Process-Induced Defects in Silicon Technology

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Gettering and Defect Engineering in Semiconductor Technology V

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Periodical:

Solid State Phenomena (Volumes 32-33)

Pages:

231-246

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.32-33.231

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Online since:

December 1993

Authors:

Bernd O. Kolbesen, M. Dellith, R. Booker, Hans Cerva, F. Gelsdorf, Werner Bergholz

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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