Process-Induced Defects in Silicon Technology

Abstract:

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Periodical:

Solid State Phenomena (Volumes 32-33)

Edited by:

H.G. Grimmeiss, M. Kittler and H. Richter

Pages:

231-246

DOI:

10.4028/www.scientific.net/SSP.32-33.231

Citation:

B. O. Kolbesen et al., "Process-Induced Defects in Silicon Technology", Solid State Phenomena, Vols. 32-33, pp. 231-246, 1993

Online since:

December 1993

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Price:

$35.00

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