Non-Equilibrium Impurity Diffusion in Silicon and Silicon Carbide

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Periodical:

Solid State Phenomena (Volumes 32-33)

Edited by:

H.G. Grimmeiss, M. Kittler and H. Richter

Pages:

253-258

DOI:

10.4028/www.scientific.net/SSP.32-33.253

Citation:

N. T. Bagraev et al., "Non-Equilibrium Impurity Diffusion in Silicon and Silicon Carbide", Solid State Phenomena, Vols. 32-33, pp. 253-258, 1993

Online since:

December 1993

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Price:

$35.00

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