Solid State Phenomena Vols. 32-33

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.32-33

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Defect Engineering in Erbium-Doped Silicon Structure Technology

Authors: N.A. Sobolev, O.V. Alexandrov, B.N. Gresserov, G.M. Gusinskii, V.O. Naidenov, E.I. Sheck, V.I. Stepanov, Yu.V. Vyzhigin, L.F. Chepik, E.P. Troshina

PN Junction Formation by Two Steps Annealing

Authors: Chin Sheng Chen, Chiufeng Lin, M.C. He, De Ren Yang, Duan Lin Que

Generation of the P-Induced Misfit Dislocations during the Diffusion in Silicon: Analytical Determination of the Criticy Conditions

Authors: F. Gaiseanu, R. Plugaru, M. Bazu, O. Buiu

Processes of Defect Formation and Gettering under Dry Etching of Si and GaAs and Measurements of Diffusion Length Profile

Authors: O.V. Kononchuk, Eugene B. Yakimov

On the Interaction of Transition Metals with Silicon Grain Boundaries

Authors: M. Stemmer, Santo Martinuzzi, Marcel Pasquinelli

105

Dry Cleaning of Silicon Wafers in a Low Energy Hydrogen Plasma

Authors: J. Ramm, E. Beck, Alex Dommann, Ignaz Eisele, D. Krüger, G. Lippert

111

Reduction of Interfacial Carbon and Boron Contamination as Sources for Degradation of Epitaxial SiGe Layers Grown by MBE

Authors: H.P. Zeindl, G. Lippert, J. Drews, R. Kurps, H.J. Osten

117

Misfit Strain Engineering in Heteroepitaxial Structures

Authors: Hans Richter, A. Fischer, H. Kühne, M. Eichler

123

Surfactant-Mediated MBE of Strained-Layer III-V Semiconductor Heterostructures

Authors: K. Ploog, E. Tournié

129

Transition Metal Gettering in Poly-Silicon for Photovoltaic Applications (Abstract)

Authors: Eicke R. Weber, J. Bailey

141