A Study of Defects Generated by BF2+ Implantation in Silicon Crystals and Their Annealing

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Periodical:

Solid State Phenomena (Volumes 47-48)

Edited by:

H. Richter, M. Kittler and C. Claeys

Pages:

377-382

DOI:

10.4028/www.scientific.net/SSP.47-48.377

Citation:

K. Lal et al., "A Study of Defects Generated by BF2+ Implantation in Silicon Crystals and Their Annealing", Solid State Phenomena, Vols. 47-48, pp. 377-382, 1996

Online since:

July 1995

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$35.00

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