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A Study of Defects Generated by BF2+ Implantation in Silicon Crystals and Their Annealing

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Periodical:

Solid State Phenomena (Volumes 47-48)

Pages:

377-382

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.47-48.377

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Online since:

July 1995

Authors:

K. Lal, G. Bhagavannarayana, G.S. Virdi

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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