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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58Alpha-Particle Irradiation Induced Defects in...

Alpha-Particle Irradiation Induced Defects in Metal-Oxide-Semiconductor Silicon Transistor

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

263-268

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.263

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Online since:

July 1997

Authors:

B.P. Koman, R.R. Ivanochko, A.K. Shkolnyy

Keywords:

Alpha Particles, MOS - Transistor, Subthreshold Current

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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