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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58Raman Spectroscopy Investigation of Silicon...

Raman Spectroscopy Investigation of Silicon Nanocrystals Formation in Silicon Nitride Films

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

501-506

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.501

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Online since:

July 1997

Authors:

Vladimir A. Volodin, M.D. Efremov, V.A. Gritsenko

Keywords:

Excimer Laser Irradiation, Nanocrystal, RAMAN, Silicon

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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