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HomeSolid State PhenomenaSolid State Phenomena Vols. 63-64Inline Analysis of Defects in Microelectronic...

Inline Analysis of Defects in Microelectronic Fabrication by Optical and Scanning Electron Microscopical Techniques

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Beam Injection Assessment of Defects in Semiconductors

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Periodical:

Solid State Phenomena (Volumes 63-64)

Pages:

457-464

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.63-64.457

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Online since:

December 1998

Authors:

C. Morilla, Martin Kittler

Keywords:

Amorphous Si, Defects/Particles, Inline Control, Optical Techniques, SEM Techniques

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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