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HomeSolid State PhenomenaSolid State Phenomena Vols. 63-64EBIC and Cathodoluminescence Study of the Bonded...

EBIC and Cathodoluminescence Study of the Bonded Silicon Wafers

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Abstract:

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Beam Injection Assessment of Defects in Semiconductors

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Periodical:

Solid State Phenomena (Volumes 63-64)

Pages:

481-488

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.63-64.481

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Online since:

December 1998

Authors:

Kenichi Ikeda, Takashi Sekiguchi, Syouko Ito, Masashi Suezawa

Keywords:

CL, EBIC, Silicon, TEM, Wafer Bonding

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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