Laser Induced Mapping for Separation of Bulk and Surface Recombination
p.33
p.33
Analysis of Minority Carrier Diffusion in the Presence of a Dislocation Array: Effective Diffusion Length, Luminescence Efficiency and Dark Current
p.45
p.45
Detection and Characterisation of 'Sleeping' Defects in Silicon by LBIC Scan Maps at 80 K.
p.53
p.53
Combined MOS/EBIC and Tem Study of Electrically Active Defects in SOI Wafers
p.61
p.61
Characterization of Laser Structures by EBIC Measurements and Simulation
p.69
p.69
Evaluation of p-n Junction Position and Channel Length in Si Devices with Resolution of a Few Nanometers by Low-Energy EBIC
p.77
p.77
Monte Carlo Simulation of the Recombination Contrast of Dislocations
p.89
p.89
EBIC Characterization of Oxygen Precipitation and Denuded Zone in Intrinsically Gettered P-Type Czochralski Silicon
p.97
p.97
Impact of Phosphorus Diffusion on the Contamination Level of Dislocations in Deformed Float Zone Silicon as Studied by Beam Injection Techniques
p.105
p.105
Characterization of Laser Structures by EBIC Measurements and Simulation
Abstract:
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Periodical:
Solid State Phenomena (Volumes 63-64)
Pages:
69-76
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Online since:
December 1998
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© 1998 Trans Tech Publications Ltd. All Rights Reserved
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