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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70Electrical Impedance Spectroscopy (EIS) as a New...

Electrical Impedance Spectroscopy (EIS) as a New Characterisation Tool for the Determination of Electrical Material Parameters in Semiconductors and Insulators

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

479-484

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.479

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Online since:

August 1999

Authors:

P. Viscor, M. Jensen, J. Vedde

Keywords:

Electrical Characterisation of Semiconductors, Electrical Impedance, Electrical Impedance and Deep Levels in Silicon, Electrical Material Parameters, Electrical Response in Semiconductors

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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