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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70Electron Spin Resonance of the Pb Centers...

Electron Spin Resonance of the P_b Centers Associated with Oxygen Precipitates in Silicon Crystals

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

485-490

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.485

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Online since:

August 1999

Authors:

Hiroshi Yamada-Kaneta, M. Koizuka

Keywords:

DLTS, ESR, Oxygen, P_b Centers, Precipitation, Silicon

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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